The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Jul. 12, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Daniel Hwung, Los Gatos, CA (US);
Yuxing Zhang, Santa Clara, CA (US);
Kalyanjit Ghosh, Pleasanton, CA (US);
Kaushik Alayavalli, Sunnyvale, CA (US);
Amit Kumar Bansal, Milpitas, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A faceplate for a processing chamber is disclosed. The faceplate has a body with a plurality of apertures formed therethrough. A flexure is formed in the body partially circumscribing the plurality of apertures. A cutout is formed through the body on a common radius with the flexure. One or more bores extend from a radially inner surface of the cutout to an outer surface of the body. A heater is disposed between flexure and the plurality of apertures. The flexure and the cutout are thermal chokes which limit heat transfer thereacross from the heater.