The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Aug. 07, 2017
Applicant:
Honeywell International Inc., Morris Plains, NJ (US);
Inventor:
Michael R. Pinter, Spokane, WA (US);
Assignee:
Honeywell International Inc., Charlotte, NC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C04B 35/653 (2006.01); C04B 35/547 (2006.01); C23C 14/06 (2006.01); C22C 1/00 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C04B 35/547 (2013.01); C04B 35/653 (2013.01); C22C 1/00 (2013.01); C23C 14/0623 (2013.01); C23C 14/3414 (2013.01); H01J 37/3426 (2013.01); H01J 37/3429 (2013.01);
Abstract
In one embodiment, a physical vapor deposition device includes a phase change material sputtering target includes a primary matrix and at least one additional phase. The primary matrix includes at least one element from Group VI of the periodic table excluding oxygen and one or more elements from Group IV or Group V of the periodic table. The additional phase is substantially homogenously dispersed in the primary matrix.