The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

Jun. 06, 2018
Applicant:

Taiyo Yuden Co., Ltd., Tokyo, JP;

Inventors:

Kuniaki Tanaka, Tokyo, JP;

Tokihiro Nishihara, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01); H03H 9/70 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02015 (2013.01); H03H 3/02 (2013.01); H03H 9/02118 (2013.01); H03H 9/131 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 9/706 (2013.01); H03H 2003/021 (2013.01); H03H 2003/025 (2013.01);
Abstract

An aluminum nitride film contains a Group IV element and a Group II or Group XII element, and an atomic composition ratio of the Group II or Group XII element to the Group IV element is less than 1.


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