The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

Apr. 05, 2017
Applicant:

Ams Sensors Singapore Pte. Ltd., Singapore, SG;

Inventors:

Qichuan Yu, Singapore, SG;

Hartmut Rudmann, Jona, CH;

Ji Wang, Singapore, SG;

Kian Siang Ng, Singapore, SG;

Simon Gubser, Weesen, CH;

James Eilertsen, Zurich, CH;

Sundar Raman Gnana Sambandam, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/0203 (2014.01); H01L 31/0232 (2014.01); H01L 31/16 (2006.01); H01L 31/18 (2006.01); H01L 33/58 (2010.01); H01L 33/54 (2010.01); H01L 31/0216 (2014.01); H01L 21/76 (2006.01); H01L 27/14 (2006.01); H01L 33/56 (2010.01); H01L 33/00 (2010.01); H01S 5/022 (2006.01);
U.S. Cl.
CPC ...
H01L 31/0203 (2013.01); H01L 21/76 (2013.01); H01L 27/14 (2013.01); H01L 31/02162 (2013.01); H01L 31/02164 (2013.01); H01L 31/02327 (2013.01); H01L 31/16 (2013.01); H01L 31/1876 (2013.01); H01L 33/0095 (2013.01); H01L 33/54 (2013.01); H01L 33/56 (2013.01); H01L 33/58 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/97 (2013.01); H01L 2924/181 (2013.01); H01L 2924/1815 (2013.01); H01L 2933/005 (2013.01); H01L 2933/0058 (2013.01); H01S 5/02228 (2013.01); H01S 5/02288 (2013.01);
Abstract

The wafer-level manufacturing method makes possible to manufacture ultrathin optical devices such as opto-electronic modules. A clear encapsulation is applied to an initial wafer including active optical components and a wafer-size substrate. Thereon, a photostructurable spectral filter layer is produced which defines apertures. Then, trenches are produced which extend through the clear encapsulation and establish sidewalls of intermediate products. Then, an opaque encapsulation is applied to the intermediate products, thus filling the trenches and producing aperture stops. Cutting through the opaque encapsulation material present in the trenches, singulated optical modules are produced, wherein side walls of the intermediate products are covered by the opaque encapsulation material. The wafer-size substrate can be attached to a rigid carrier wafer during most process steps.


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