The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

Feb. 06, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Adam Yang, Fishkill, NY (US);

Choong Ho Lee, Fishkill, NY (US);

Elnatan Mataev, Beacon, NY (US);

Jonathan Fry, Fishkill, NY (US);

Cheng-Yi Lin, Hopewell Junction, NY (US);

Bharat Biyani, Wappingers Falls, NY (US);

Jang Sim, Dutchess, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 27/11556 (2017.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0603 (2013.01); H01L 21/0217 (2013.01); H01L 21/02164 (2013.01); H01L 21/02178 (2013.01); H01L 21/02181 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 27/11556 (2013.01);
Abstract

A reinforced vertical-NAND structure is provided. The reinforced vertical-NAND structure includes a first set of interleaved oxide and nitride layers formed into first and second vertical structures. The first vertical structure rises from a first section of a substrate and the second vertical structure rises from a second section of the substrate. The reinforced vertical-NAND structure also includes a reinforcing layer and a second set of interleaved oxide and nitride layers formed into third and fourth vertical structures. The reinforcing layer includes sheets, which are distinct and laid across respective tops of the first and second vertical structures, and bridges connecting the sheets. The third vertical structure rises from the sheet corresponding to the first vertical structure and the fourth vertical structure rises from the sheet corresponding to the second vertical structure.


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