The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Sep. 20, 2018
Applicant:
Marco Systemanalyse Und Entwicklung Gmbh, Dachau, DE;
Inventor:
Martin Reuter, Dachau, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B23Q 1/34 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); B25J 15/00 (2006.01); H02N 2/02 (2006.01); F16M 13/00 (2006.01); H02N 2/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67011 (2013.01); B23Q 1/34 (2013.01); B25J 15/00 (2013.01); H01L 41/0825 (2013.01); H01L 41/09 (2013.01); F16M 13/00 (2013.01); H02N 2/0095 (2013.01); H02N 2/021 (2013.01);
Abstract
A positioning apparatus comprises a base element provided for fastening to a robot, a base movably supported at the base element, and a piezoactuator by which the base is movable in a direction relative to the base element. A second piezoactuator is provided by which a counterweight is simultaneously movable in an opposite direction.