The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Oct. 17, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Atsuki Naruse, Shiojiri, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/14 (2006.01); G01D 5/24 (2006.01); G01P 15/18 (2013.01); G01P 15/125 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01L 1/144 (2013.01); G01D 5/24 (2013.01); G01P 15/125 (2013.01); G01P 15/18 (2013.01); G01P 15/0802 (2013.01); G01P 2015/0814 (2013.01); G01P 2015/0854 (2013.01);
Abstract
A physical quantity sensor includes a base unit as a support substrate, provided with a cavity that is open on one side, a movable unit which is formed on an open side of the cavity and is capable of displacing in a first direction, and spring units that are formed on the open side of the cavity and are connected to the movable unit. A length of the spring units in a second direction that is a direction, which intersects the first direction and in which the base unit overlaps the movable unit, is shorter than a length of the movable unit in the second direction and is longer than a length of the spring units in the first direction.