The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

Aug. 02, 2018
Applicant:

Microjet Technology Co., Ltd., Hsinchu, TW;

Inventors:

Hao-Jan Mou, Hsinchu, TW;

Ta-Wei Hsueh, Hsinchu, TW;

Ying-Lun Chang, Hsinchu, TW;

Rong-Ho Yu, Hsinchu, TW;

Cheng-Ming Chang, Hsinchu, TW;

Hsien-Chung Tai, Hsinchu, TW;

Wen-Hsiung Liao, Hsinchu, TW;

Yung-Lung Han, Hsinchu, TW;

Chi-Feng Huang, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 43/04 (2006.01); F04B 53/20 (2006.01); F04B 45/047 (2006.01);
U.S. Cl.
CPC ...
F04B 43/046 (2013.01); F04B 45/047 (2013.01); F04B 53/20 (2013.01);
Abstract

A micro-electromechanical fluid control device includes at least one flow guiding unit. The at least one flow guiding unit includes an inlet plate, a substrate, a resonance membrane, an actuating membrane and an outlet plate sequentially stacked. A first chamber is defined between the resonance membrane and the actuating membrane and a second chamber is defined between the actuating membrane and the outlet plate. While the piezoelectric membrane of the flow guiding unit drives the actuating membrane, a fluid is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber via the central aperture of the resonance membrane, transported into the second chamber via a vacant space of the actuating membrane, and discharged out from the outlet of the outlet plate, so as to control the fluid to flow.


Find Patent Forward Citations

Loading…