The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Nov. 18, 2014
Applicant:
Element Six Technologies Limited, Oxfordshire, GB;
Inventors:
Matthew Markham, Oxfordshire, GB;
Alastair Stacey, Oxfordshire, GB;
Daniel Twitchen, Oxfordshire, GB;
Assignee:
ELEMENT SIX TECHNOLOGIES LIMITED, Oxfordshire, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 31/22 (2006.01); C30B 25/20 (2006.01); C30B 29/04 (2006.01); C30B 29/68 (2006.01); H01L 21/04 (2006.01); H01L 29/16 (2006.01); C30B 25/18 (2006.01);
U.S. Cl.
CPC ...
C30B 31/22 (2013.01); C30B 25/186 (2013.01); C30B 25/20 (2013.01); C30B 25/205 (2013.01); C30B 29/04 (2013.01); C30B 29/68 (2013.01); H01L 21/042 (2013.01); H01L 29/1602 (2013.01);
Abstract
A single crystal CVD diamond component comprising: a surface, wherein at least a portion of said surface is formed of as-grown growth face single crystal CVD diamond material which has not been polished or etched and which has a surface roughness Rof no more than 100 nm; and a layer of NVdefects, said layer of NVdefects being disposed within 1 μm of the surface, said layer of NVdefects having a thickness of no more than 500 nm, and said layer of NVdefects having a concentration of NVdefects of at least 10NV/cm.