The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

May. 03, 2018
Applicant:

Vishay Electronic Gmbh, Selb, DE;

Inventors:

Jaroslaw Kita, Gefrees, DE;

Ralf Moos, Bayreuth, DE;

Christian Münch, Warmensteinach, DE;

Véronique Poulain, Mons, BE;

Michaela Schubert, Kemnath, DE;

Sophie Schuurman, Céroux-Mousty, BE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01C 7/04 (2006.01); C23C 4/12 (2016.01); C23C 24/08 (2006.01);
U.S. Cl.
CPC ...
C23C 24/082 (2013.01); H01C 7/043 (2013.01);
Abstract

The present invention relates to a method of producing a negative temperature coefficient resistor (NTCR) sensor, the method comprising the steps of: providing a mixture comprising uncalcined powder and a carrier gas in an aerosol-producing unit, with the uncalcined powder comprising metal oxide components; forming an aerosol from said mixture and said carrier gas and accelerating said aerosol in a vacuum towards a substrate arranged in a deposition chamber; forming a film of the uncalcined powder of said mixture on said substrate; and transforming the film into a layer of spinel-based material by applying a heat treatment step.


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