The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

Nov. 23, 2018
Applicant:

Korea Institute of Science and Technology, Seoul, KR;

Inventors:

Yong-Won Song, Seoul, KR;

Md. Siam Uddin, Seoul, KR;

Jaehyun Park, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/26 (2006.01); C23C 18/12 (2006.01); H01L 21/02 (2006.01); H01S 3/067 (2006.01); H01S 3/113 (2006.01); H01S 3/10 (2006.01); H01S 3/23 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); H01S 3/0941 (2006.01); H01L 29/16 (2006.01); H01L 29/786 (2006.01); H01S 3/094 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1204 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); C23C 18/125 (2013.01); H01L 21/0243 (2013.01); H01L 21/0262 (2013.01); H01L 21/02527 (2013.01); H01S 3/06716 (2013.01); H01S 3/06754 (2013.01); H01S 3/10061 (2013.01); H01S 3/113 (2013.01); H01S 3/23 (2013.01); H01L 29/1606 (2013.01); H01L 29/78684 (2013.01); H01S 3/0941 (2013.01); H01S 3/094003 (2013.01);
Abstract

A method for directly synthesizing graphene on a surface of a target object includes: forming a non-metal layer on a support substrate; disposing the target object in a space above the support substrate, which is opposite to the non-metal layer; and injecting a carbon precursor to form graphene on the surface of the target object to synthesize a graphene film, wherein the graphene is nucleated and grown by a decomposition of the carbon precursor, the carbon precursor is decomposed by heat with catalytic assistance from the non-metal layer, and a carbon atom from the decomposition of the precursor is anchored on the surface to form the graphene film.


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