The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
May. 17, 2018
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Inventors:
Dejiang Zhao, Beijing, CN;
Guangcai Yuan, Beijing, CN;
Assignee:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); F27B 14/12 (2006.01); F27B 14/06 (2006.01); C23C 14/54 (2006.01); F27B 14/10 (2006.01); F27B 14/08 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); C23C 14/542 (2013.01); F27B 14/06 (2013.01); F27B 14/12 (2013.01); F27B 2014/0843 (2013.01); F27B 2014/102 (2013.01);
Abstract
A crucible, an evaporation source and an evaporation device are disclosed. The crucible includes a crucible body. The crucible body includes: an inner heating layer with a first heater assembly and an outer heating layer with a second heater assembly. The outer heating layer is at a periphery of the inner heating layer, and surrounds the inner heating layer, and a space between the outer heating layer and the inner heating layer defines an accommodation space for a to-be-evaporated material.