The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

Aug. 21, 2019
Applicant:

Stmicroelectronics (Malta) Ltd, Kirkop, MT;

Inventors:

Conrad Cachia, Tarxien, MT;

David Oscar Vella, Attard, MT;

Damian Agius, San Gwann, MT;

Maria Spiteri, Zejtun, MT;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B61B 7/00 (2006.01); H01L 23/00 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
B81B 7/007 (2013.01); B81C 1/00301 (2013.01); H01L 24/97 (2013.01); B81B 2207/098 (2013.01); B81C 2203/0154 (2013.01); H01L 23/3121 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/48145 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/73227 (2013.01); H01L 2224/73265 (2013.01); H01L 2224/92124 (2013.01); H01L 2224/92164 (2013.01); H01L 2224/94 (2013.01); H01L 2224/97 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/00012 (2013.01); H01L 2924/181 (2013.01); H01L 2924/18161 (2013.01);
Abstract

A MEMS device package comprising a first die of semiconductor material including a contact pad and a second die of semiconductor material stacked on the first die. The second die is smaller than the first die. The second die includes a contact pad, and a conductive wire is coupled between the contact pad of the first die and a contact pad of the second die. A mold compound is on the second die and the first die. A vertical connection structure is on the contact pad of the second die. The vertical connection structure extends through the mold compound.


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