The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Mar. 10, 2016
Applicant:
Mitsubishi Electric Corporation, Tokyo, JP;
Inventor:
Tamio Matsumura, Tokyo, JP;
Assignee:
Mitsubishi Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/38 (2014.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); B23K 26/142 (2014.01); H01L 21/683 (2006.01); B23K 101/18 (2006.01);
U.S. Cl.
CPC ...
B23K 26/38 (2013.01); B23K 26/142 (2015.10); H01L 21/67051 (2013.01); H01L 21/67092 (2013.01); H01L 21/6838 (2013.01); H01L 21/68792 (2013.01); B23K 2101/18 (2018.08);
Abstract
A substrate suction stage including a substrate support unit having a top surface, a cavity formed therein, an ejection hole formed therein and extending from the cavity to the top surface, and a suction hole formed therein for connecting the ejection hole and the top surface, and a gas supply unit for supplying gas into the cavity, wherein the ejection hole surrounds the suction hole in plan view, and when gas is supplied into the cavity, gas in the suction hole is discharged to the outside via the ejection hole.