The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

May. 24, 2011
Applicants:

Ruth Houbertz, Wurzburg, DE;

Daniela Trotschel, Werneck, DE;

Inventors:

Ruth Houbertz, Wurzburg, DE;

Daniela Trotschel, Werneck, DE;

Assignee:

Multiphoton Optics GmbH, Würzburg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/06 (2006.01); H01L 41/187 (2006.01); C04B 35/626 (2006.01); C08F 20/06 (2006.01); C09D 4/00 (2006.01); C04B 35/491 (2006.01); C04B 35/468 (2006.01); H01L 41/318 (2013.01); C23C 18/06 (2006.01); H01L 41/331 (2013.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01); H01L 41/18 (2006.01);
U.S. Cl.
CPC ...
B05D 3/06 (2013.01); C04B 35/468 (2013.01); C04B 35/491 (2013.01); C04B 35/6263 (2013.01); C04B 35/6264 (2013.01); C04B 35/62675 (2013.01); C04B 35/62685 (2013.01); C08F 20/06 (2013.01); C09D 4/00 (2013.01); C23C 18/06 (2013.01); C23C 18/1216 (2013.01); C23C 18/1254 (2013.01); C23C 18/143 (2019.05); H01L 41/18 (2013.01); H01L 41/1871 (2013.01); H01L 41/1876 (2013.01); H01L 41/318 (2013.01); H01L 41/331 (2013.01); C04B 2235/441 (2013.01); C04B 2235/606 (2013.01); C04B 2235/661 (2013.01); C04B 2235/665 (2013.01);
Abstract

The invention relates to a process for producing a structured shaped body or a layer of this type from a precursor of a metal oxide or mixed oxide selected from compounds of metals selected from among magnesium, strontium, barium, aluminum, gallium, indium, silicon, tin, lead and the transition metals. The process includes at least the following steps: (a) dissolving at least one compound of the at least one metal in an organic solvent and/or exchanging a ligand of the one or more dissolved metallic compounds for a stabilizing ligand, (b) adding a ligand that has at least one photochemically polymerizable group and at least one such group that allows a stable complex formation to the solution and forming a sol with or from the product of this reaction (precursor), (c) applying the sol on a substrate, and (d) exposing the sol anisotropically in such a way that a polymerization of the photochemically polymerizable groups takes place in the exposed areas.


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