The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
May. 11, 2017
Applicant:
Nihat Okulan, Los Angeles, CA (US);
Inventor:
Nihat Okulan, Los Angeles, CA (US);
Assignee:
Other;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2013.01); G01L 1/18 (2006.01); G01L 1/22 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/04 (2006.01);
U.S. Cl.
CPC ...
H01L 41/22 (2013.01); G01L 1/18 (2013.01); G01L 1/2293 (2013.01); H01L 41/04 (2013.01); H01L 41/047 (2013.01); H01L 41/0471 (2013.01); H01L 41/0472 (2013.01); H01L 41/08 (2013.01); H01L 41/0805 (2013.01);
Abstract
Semiconductor strain gages fabricated on Silicon-on-insulator (SOI) material, and the method of making them. Force sensing elements are uniformly batch-fabricated at wafer level and singulated individually by a wire bonding method. In another method, they are singulated by plucking them off the wafer from their attachment site.