The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 29, 2020

Filed:

Jun. 26, 2019
Applicant:

Northrop Grumman Systems Corporation, Falls Church, VA (US);

Inventors:

Josephine Chang, Ellicott City, MD (US);

Ken Nagamatsu, Ellicott City, MD (US);

Robert S. Howell, Silver Spring, MD (US);

Sarat Saluru, Baltimore, MD (US);

Assignee:

NORTHROP GRUMMAN SYSTEMS CORPORATION, Falls Church, VA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01); H01L 27/088 (2006.01); H01L 29/15 (2006.01); H01L 29/20 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 21/28 (2006.01); H01L 21/8252 (2006.01); H01L 29/205 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7785 (2013.01); H01L 21/02507 (2013.01); H01L 21/28264 (2013.01); H01L 21/8252 (2013.01); H01L 27/0883 (2013.01); H01L 29/155 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/4236 (2013.01); H01L 29/42376 (2013.01); H01L 29/66462 (2013.01);
Abstract

An enhancement-mode (e-mode) field effect transistor (FET) comprises a buffer layer, and a superlattice of conducting channels on the buffer layer and including a trench that cuts down through the superlattice into the buffer layer and separates the superlattice into a source-access region and a drain-access region, wherein the buffer layer forms a bottom of the trench. The e-mode FET includes a source and a drain adjacent to the source-access region and the drain-access region, respectively. The e-mode FET further includes a gate in the trench, such that a voltage above a threshold voltage of the e-mode FET applied to the gate induces a current channel in the buffer layer underneath the gate, which electrically connects the source-access region to the drain-access region to turn on the e-mode FET, and (ii) a voltage below the threshold voltage applied to the gate eliminates the current channel, which electrically disconnects the source-access region from the drain-access region to turn off the e-mode FET.


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