The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Feb. 21, 2018
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventors:
Takahito Nishimura, Kuwana, JP;
Suigen Kanda, Nagoya, JP;
Takamasa Usui, Koto, JP;
Masayoshi Tagami, Kuwana, JP;
Jun Iljima, Yokkaichi, JP;
Assignee:
Toshiba Memory Corporation, Minato-ku, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/66 (2006.01); H01L 21/027 (2006.01); G03F 7/16 (2006.01); B29C 59/02 (2006.01); B29L 31/34 (2006.01);
U.S. Cl.
CPC ...
H01L 22/24 (2013.01); B29C 59/026 (2013.01); G03F 7/0002 (2013.01); G03F 7/168 (2013.01); H01L 21/0271 (2013.01); B29L 2031/34 (2013.01); H01L 22/12 (2013.01);
Abstract
According to an embodiment, a template includes a flat plate-shaped first member, a flat plate-shaped second member including a pattern arrangement face, and a flat plate-shaped third member provided with an opening at a position corresponding to an arrangement position of the second member. The template is dividable at a position of at least one of a first boundary between the first member and the second member and a second boundary between the first member and the third member.