The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Jul. 20, 2017
Applicant:
Jiaco Instruments Holding B.v., Delfgauw, NL;
Inventors:
Jiaqi Tang, Delfgauw, NL;
Cornelis Ignatius Maria Beenakker, Roosendaal, NL;
Willibrordus Gerardus Maria Van Den Hoek, Saratoga, CA (US);
Assignee:
JIACO Instruments Holding B.V., Delfgauw, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01); H01L 21/56 (2006.01); H01L 21/67 (2006.01); H01L 23/00 (2006.01); H05K 3/26 (2006.01); H05K 3/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31138 (2013.01); H01L 21/56 (2013.01); H01L 21/67126 (2013.01); H01L 24/73 (2013.01); H05K 3/26 (2013.01); H05K 3/288 (2013.01); H01L 2224/45147 (2013.01); H01L 2224/73265 (2013.01); H05K 2203/0285 (2013.01); H05K 2203/095 (2013.01);
Abstract
The invention is directed to a method for treating an electronic device that is encapsulated in a plastic package, said method comprising the steps of providing a gas stream comprising a hydrogen source; inducing a hydrogen-containing plasma stream from said gas; and directing the hydrogen-containing plasma stream to the plastic package to etch the plastic package.