Polarization independent wideband reflectors and methods for their manufacture

Abstract

Unpolarized broadband reflectors enabled by a serial arrangement of a pair of polarized subwavelength gratings are disclosed. Device illustrations include partially-etched crystalline-silicon films on quartz substrates and amorphous silicon films on glass. The individual reflectors exhibit extremely wide spectral reflection bands in one polarization. By arranging two such reflectors sequentially with orthogonal periodicities, there results an unpolarized spectral band that exceeds those of the individual polarized bands. In the prototypes disclosed, there results zero-order reflectance exceeding 97% under unpolarized light incidence over a 500-nm-wide wavelength band. This wideband represents a ˜44% fractional band in the near infrared spectral band. The elemental polarization-sensitive reflectors based on one-dimensional resonant gratings have simple design, robust performance, and are straightforward to fabricate. Hence, this technology is a promising alternative to traditional multilayer thin-film reflectors especially at longer wavelengths of light where multilayer deposition may be infeasible or impractical.