The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Oct. 17, 2017
Applicant:
Toppan Printing Co., Ltd., Tokyo, JP;
Inventors:
Sumika Tamura, Tokyo, JP;
Mikio Shinno, Tokyo, JP;
Daisei Fujito, Tokyo, JP;
Kiyoaki Nishitsuji, Tokyo, JP;
Takehiro Nishi, Tokyo, JP;
Naoko Mikami, Tokyo, JP;
Assignee:
TOPPAN PRINTING CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25B 11/04 (2006.01); C25C 1/08 (2006.01); C25C 7/08 (2006.01); C25D 11/34 (2006.01); C25D 3/56 (2006.01); C25D 5/16 (2006.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); C25D 1/04 (2006.01); C25D 1/10 (2006.01);
U.S. Cl.
CPC ...
C25B 11/041 (2013.01); C23C 14/042 (2013.01); C25C 1/08 (2013.01); C25C 7/08 (2013.01); C25D 1/04 (2013.01); C25D 1/10 (2013.01); C25D 5/16 (2013.01); C25D 11/34 (2013.01); C25D 3/562 (2013.01); H01L 51/0011 (2013.01);
Abstract
A vapor deposition metal mask substrate includes a nickel-containing metal sheet including a obverse surface and a reverse surface, which is opposite to the obverse surface. At least one of the obverse surface and the reverse surface is a target surface for placing a resist layer. The target surface has a surface roughness Sa of less than or equal to 0.019 μm. The target surface has a surface roughness Sz of less than or equal to 0.308 μm.