The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Nov. 29, 2017
Applicant:
Lg Display Co., Ltd., Seoul, KR;
Inventors:
Shin-Bok Lee, Seoul, KR;
Tae-Joon Song, Paju-si, KR;
Nam-Kook Kim, Suwon-si, KR;
Soon-Sung Yoo, Goyang-si, KR;
Hwan-Keon Lee, Daejeon, KR;
Assignee:
LG Display Co., Ltd., Seoul, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); B05C 1/08 (2006.01); H01L 51/00 (2006.01); C23C 14/56 (2006.01); C23C 16/04 (2006.01); C23C 16/54 (2006.01); C23C 14/04 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); B05C 1/08 (2013.01); C23C 14/042 (2013.01); C23C 14/562 (2013.01); C23C 16/042 (2013.01); C23C 16/545 (2013.01); H01L 51/0097 (2013.01); H01L 51/0011 (2013.01);
Abstract
Disclosed is a roll-to-roll substrate deposition apparatus which may control the width and length of a deposition area so as to adjust the size of a thin film. The roll-to-roll substrate deposition apparatus includes a deposition area controller disposed between a flexible substrate supplied to the inside of a chamber and a deposition unit supplying a deposition material to the flexible substrate so as to adjust the width and length of a thin film formed of the deposition material on one surface of the flexible substrate.