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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10872759 B1

PDFFull Text
Date of Patent:
Dec. 22, 2020

Filed:

Jun. 24, 2015

Silicon carbide single crystal substrate and method for manufacturing the same

Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventors:

Kyoko Okita, Itami, JP;

Tsubasa Honke, Itami, JP;

Assignee:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Attorneys:

Baker Botts L.L.P.

Michael A. Sartori

Primary Examiner:

Steven H Loke

Assistant Examiner:

Samuel Park

Int. Cl.
CPC ...
H01L 29/02 (2006.01); H01L 21/02 (2006.01); C30B 29/36 (2006.01); B24B 1/00 (2006.01); B24B 9/00 (2006.01); B24D 5/02 (2006.01); B24B 9/06 (2006.01); B24D 3/28 (2006.01); H01L 29/16 (2006.01); B24B 19/22 (2006.01); C30B 29/64 (2006.01); C30B 33/00 (2006.01); C30B 25/20 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02035 (2013.01); B24B 1/00 (2013.01); B24B 9/00 (2013.01); B24B 9/065 (2013.01); B24B 19/22 (2013.01); B24D 3/28 (2013.01); B24D 5/02 (2013.01); C30B 29/36 (2013.01); C30B 29/64 (2013.01); C30B 33/00 (2013.01); H01L 21/02013 (2013.01); H01L 21/02021 (2013.01); H01L 29/1608 (2013.01); C30B 25/20 (2013.01); H01L 29/045 (2013.01);
Abstract

A silicon carbide single crystal substrate includes a first main surface, a second main surface, and a circumferential edge portion. The second main surface is opposite to the first main surface. The circumferential edge portion connects the first main surface and the second main surface. The circumferential edge portion has a linear orientation flat portion, a first arc portion having a first radius, and a second arc portion connecting the orientation flat portion and the first arc portion and having a second radius smaller than the first radius, when viewed along a direction perpendicular to the first main surface.

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