The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Jun. 24, 2016
Shimadzu Corporation, Kyoto-shi, Kyoto, JP;
Kenji Yamasaki, Kyoto, JP;
Akinori Kogure, Kyoto, JP;
SHIMADZIJ CORPORATION, Kyoto, JP;
Abstract
A data processing device for a scanning probe microscope, the data processing device processing biaxial data indicating a change in a second physical quantity with respect to a change in a first physical quantity, the biaxial data being acquired for each of a plurality of measurement points on a sample surface by scanning the sample surface with a probe using a scanning probe microscope, the data processing device includes: a feature amount calculatorthat acquires one or a plurality of types of feature amounts from the biaxial data at each measurement point; a feature amount selectorthat causes a user to select one of the one or the plurality of types of feature amounts; a two-dimensional mapping image display unitthat displays the feature amount on a screen as a two-dimensional mapping image with each measurement point as one pixel based on selection of the feature amount by the user; and a biaxial data display unitthat, when the user selects one of the pixels in the two-dimensional mapping image, displays on the screen the selected pixel and the biaxial data of the measurement point corresponding to one or a plurality of pixels adjacent to the selected pixel.