The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Apr. 25, 2019
Measurement Specialties, Inc., Hampton, VA (US);
Ya-Mei Chen, Fremont, CA (US);
James Hoffman, Santa Clara, CA (US);
MEASUREMENT SPECIALTIES, INC., Hampton, VA (US);
Abstract
Sensor devices comprise a sensor die having a first membrane between a first outside surface and a buried cavity, and a second membrane between the buried cavity and a recessed section of the sensor die forming a backside cavity, wherein the first and second membranes oriented vertically adjacent one another. The sensor die comprises first and second members that are attached together, the buried cavity is formed between the members, and the first member comprises the first diaphragm and the second member comprises the second diaphragm. The membranes are configured to enable sensing over different ranges. Electrical sensing elements are in the sensor die for measuring movement of each of the first and second sensing membranes over the different ranges. Electrical contacts connected with sensing elements are exposed along a sensor die surface for providing an output signal for monitoring by an external device.