The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Jun. 29, 2018
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Sun-Ho Kim, Yongin-si, KR;
Myung-Soo Huh, Yongin-si, KR;
Jeong-Ho Yi, Yongin-si, KR;
Cheol-Rae Jo, Yongin-si, KR;
Hyun-Woo Joo, Yongin-si, KR;
Yong-Suk Lee, Yongin-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); H01L 21/56 (2006.01); C23C 14/24 (2006.01); C23C 16/44 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/564 (2013.01); C23C 14/24 (2013.01); C23C 16/4412 (2013.01); H01L 21/56 (2013.01); H01L 51/0008 (2013.01);
Abstract
A deposition apparatus configured to perform a deposition process on a substrate, the deposition apparatus including a chamber having an exhaust opening in a surface, a deposition source in the chamber configured to eject one or more deposition materials toward the substrate, a cooling plate corresponding to an inner surface of the chamber, at which the exhaust opening is formed, a refrigerator contacting the cooling plate, and a pump coupled to the exhaust opening.