The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Nov. 28, 2018
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Michael Hutzler, Villach, AT;

Christof Altstaetter, Villach, AT;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/739 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/40 (2006.01); H01L 29/45 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7811 (2013.01); H01L 29/0638 (2013.01); H01L 29/0696 (2013.01); H01L 29/404 (2013.01); H01L 29/407 (2013.01); H01L 29/45 (2013.01); H01L 29/66734 (2013.01); H01L 29/739 (2013.01); H01L 29/7813 (2013.01);
Abstract

A power semiconductor die conducts a load current between front and back side load terminals. The die includes an active region with a plurality of columnar trench cells. Each columnar trench cell includes: a section of a drift zone, a section of a channel zone and a section of a source zone, the channel zone section being electrically connected to the front side load terminal and isolating the source zone section from the drift zone section; and a control section with at least one control electrode in a control trench. An edge termination region between the die edge and the active region includes a front side zone configured to have an electrical potential different from an electrical potential of the front side load terminal. An isolating trench structure is arranged between the front side zone and the channel zone which is electrically connected to the front side load terminal.


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