The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Mar. 08, 2018
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventors:

Tomonari Shioda, Yokkaichi, JP;

Tatsuo Ishida, Kuwana, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/1157 (2017.01); H01L 27/11582 (2017.01); H01L 27/11524 (2017.01); H01L 27/11556 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 27/1157 (2013.01); H01L 27/11524 (2013.01); H01L 27/11556 (2013.01);
Abstract

According to one embodiment, the substrate includes a plurality of protrusions having columnar configurations, and a void being formed below the protrusions. The stacked body is provided on the substrate. The stacked body includes a plurality of electrode layers stacked with an insulator interposed. The semiconductor body contacts the protrusion and extends through the stacked body in a stacking direction of the stacked body. Upper ends of the protrusions are positioned at a height between a lowermost electrode layer and an electrode layer of a second layer from a bottom of the electrode layers.


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