The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Feb. 27, 2017
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventor:

Takeshi Shibata, Akashi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 11/00 (2006.01); B65G 47/90 (2006.01); B25J 18/04 (2006.01); B25J 9/04 (2006.01); B25J 9/06 (2006.01); B65G 49/07 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); B25J 9/042 (2013.01); B25J 9/06 (2013.01); B25J 11/0095 (2013.01); B25J 18/04 (2013.01); B65G 47/902 (2013.01); B65G 49/07 (2013.01); H01L 21/67742 (2013.01); H01L 21/67751 (2013.01); H01L 21/67778 (2013.01); H01L 21/67748 (2013.01); H01L 21/68707 (2013.01);
Abstract

A robot including an elevating/lowering drive mechanism for elevating/lowering a robot arm having an end effector holding a substrate, and a cover unit for covering the elevating/lowering drive mechanism, wherein the elevating/lowering drive mechanism has a fixed portion having a guide rail extending in a vertical direction and an elevating/lowering portion driven to be elevated/lowered along the guide rail, wherein the robot arm has a base portion link connecting to the elevating/lowering portion and a link member connected to the base portion link, and wherein the cover unit has a fixed-side cover provided to the fixed portion and the elevating/lowering portion moves, and a guide rail cover provided to the elevating/lowering portion for covering an upper portion of the guide rail exposed when the elevating/lowering portion is lowered. A substrate conveyance robot capable of miniaturizing a substrate conveyance apparatus without inconvenience such as decline in rigidity of a robot arm.


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