The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Jul. 26, 2019
Yaskawa America, Inc., Waukegan, IL (US);
John Charles Rogers, Danville, CA (US);
Clark Thomas Tella, San Francisco, CA (US);
YASKAWA AMERICA, INC., Waukegan, IL (US);
Abstract
An apparatus including a base, a drive device disposed on the base, a sensor unit disposed on the base, and an engagement device. The drive device having an output shaft with a wafer receiving surface, and the drive device being configured to rotate the output shaft about an axis of rotation. The sensor unit being configured to sense a wafer received on the wafer receiving surface. The engagement device being configured to engage and disengage a translational mechanism between the drive device and the sensor unit. When the engagement device engages the translational mechanism, rotation of the output shaft about the axis of rotation by the drive device changes a relative positional relationship between the sensor unit and the axis of rotation.