The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Jul. 26, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Frank Sinclair, Boston, MA (US);
Julian G. Blake, Gloucester, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/22 (2012.01); H01L 21/027 (2006.01); G03F 1/60 (2012.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
G03F 1/22 (2013.01); G03F 1/60 (2013.01); H01L 21/027 (2013.01); H01L 21/26586 (2013.01);
Abstract
A substrate assembly may include a substrate base; and a low emission implantation mask, disposed on the substrate base. The low emission implantation mask may include a carbon-containing material, the carbon-containing material comprising an isotopically purified carbon, formed from aC carbon isotope precursor.