The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Jan. 15, 2019
Applicants:

Hisamichi Sekine, Tokyo, JP;

Maiko Nagawatari, Tokyo, JP;

Seiya Sato, Tokyo, JP;

Inventors:

Hisamichi Sekine, Tokyo, JP;

Maiko Nagawatari, Tokyo, JP;

Seiya Sato, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/10 (2006.01); G02B 26/08 (2006.01); H01L 41/332 (2013.01); H01L 41/113 (2006.01); H01L 41/09 (2006.01); H01L 41/083 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
G02B 26/101 (2013.01); G02B 26/0816 (2013.01); G02B 26/0858 (2013.01); H01L 41/083 (2013.01); H01L 41/0933 (2013.01); H01L 41/1132 (2013.01); H01L 41/332 (2013.01); H01L 41/0825 (2013.01); H01L 41/0953 (2013.01);
Abstract

An optical scanning device includes: a mirror that has an optical reflection surface; a mirror support unit configured to support the mirror; a pair of drive beams arranged on both sides of the mirror support unit and connected such that the mirror support unit is swingable; a drive source provided on the drive beams and configured to swing the mirror support unit, the drive source including a stack structure of a plurality of piezoelectric thin films; and a piezoelectric sensor formed on a connection beam connected to the drive source or the drive beams, a number of piezoelectric thin films included in the piezoelectric sensor being less than a number of the piezoelectric thin films included in the drive source.


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