The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Dec. 21, 2018
Seiko Epson Corporation, Tokyo, JP;
Yoshitomo Kumai, Okaya, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
A wire grid polarization element includes a wire grid including a plurality of wire-shaped metal layers arranged in parallel on one surface of a substrate, and a light-absorbing layer including a germanium film containing at least one of oxygen and nitrogen is provided on a side opposite to the substrate with respect to the plurality of wire-shaped metal layers. Such a germanium film can be formed by mixing an oxygen gas or a nitrogen gas into an argon gas in film formation by reactive sputtering. In this case, a flow rate of the oxygen gas or the nitrogen gas is made appropriate and thus, a complex refraction index of the germanium film is set to an appropriate value, and a reflectance with respect to linearly polarized light vibrating in an extending direction of the wire-shaped metal layers is set to 3.0% or lower.