The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Jun. 07, 2018
Applicant:

Getec Microscopy Gmbh, Vienna, AT;

Inventors:

Peter Ziger, Ehrenhausen, AT;

Georg E. Fantner, Chavannes-Rennes, CH;

Jeffrey M. Markakis, Santa Barbara, CA (US);

Assignee:

GETEC MICROSCOPY GMBH, Vienna, AT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/02 (2010.01); G01Q 10/00 (2010.01); G01Q 60/38 (2010.01); G01Q 70/00 (2010.01); B23Q 1/34 (2006.01); G01Q 10/04 (2010.01); G01Q 70/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 30/02 (2013.01); B23Q 1/34 (2013.01); G01Q 10/045 (2013.01); G01Q 60/38 (2013.01); G01Q 70/02 (2013.01);
Abstract

A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.


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