The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Sep. 28, 2017
Applicant:
Sharp Kabushiki Kaisha, Sakai, JP;
Inventor:
Masahiro Inuzuka, Sakai, JP;
Assignee:
SHARP KABUSHIKI KAISHA, Sakai, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25F 3/14 (2006.01); C23C 14/04 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01); C25F 7/00 (2006.01);
U.S. Cl.
CPC ...
C25F 3/14 (2013.01); C23C 14/04 (2013.01); C25F 7/00 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01);
Abstract
A manufacturing method of a mask sheet includes a film formation step for forming a metal layer provided with a plurality of openings on a mask substrate, and a shaping step for shaping the metal layer using pulse electrolysis.