The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Jun. 27, 2018
Boe Technology Group Co., Ltd., Beijing, CN;
Wenqi Liu, Beijing, CN;
Zhongyuan Sun, Beijing, CN;
Haibin Zhu, Beijing, CN;
Jinxiang Xue, Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
The present disclosure provides a mask plate and a method for manufacturing the same. The mask plate comprises a body provided with a plurality of openings, in which a first surface of the body is provided with cofferdams each surrounding a corresponding opening, and each cofferdam is configured to confine a diffusion range of a material deposited on a substrate through the opening. In the present disclosure, by providing, on a surface of the body of the mask plate, cofferdams each surrounding edges of each corresponding opening, the cofferdams can effectively prevent the deposition material from depositing into an invalid region, thus CVD shadow can be reduced and the packaging effect can be improved in the process of film deposition or evaporation by chemical vapor deposition (CVD).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile