The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Apr. 21, 2017
Applicants:

Canon Kabushiki Kaisha, Tokyo, JP;

Fuji Chemical Co., Ltd., Osaka, JP;

Inventors:

Motokazu Kobayashi, Yokohama, JP;

Minako Nakasu, Tokyo, JP;

Naoyuki Koketsu, Komae, JP;

Chiemi Shimizu, Hirakata, JP;

Fumio Uchida, Daito, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 1/00 (2006.01); C23C 18/12 (2006.01); B41J 2/16 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H01L 41/318 (2013.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
C09D 1/00 (2013.01); B41J 2/161 (2013.01); B41J 2/164 (2013.01); C23C 18/1216 (2013.01); C23C 18/1241 (2013.01); C23C 18/1283 (2013.01); C23C 18/1291 (2013.01); H01L 41/0805 (2013.01); H01L 41/1876 (2013.01); H01L 41/318 (2013.01); B41J 2202/03 (2013.01); H01L 41/0973 (2013.01);
Abstract

Provided is a coating liquid for forming a piezoelectric thin film containing lead zirconate titanate, the coating liquid including a complex precursor containing at least three kinds of metal elements of Pb, Ti, and Zr, the coating liquid being free from an exothermic peak at a temperature of 450° C. or more, or having a heat generation amount at a temperature of from 400° C. to 450° C., which is larger than a heat generation amount at a temperature of from 450° C. to 500° C., in differential thermal analysis of the coating liquid.


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