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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10865262 B1

PDFFull Text
Date of Patent:
Dec. 15, 2020

Filed:

Sep. 08, 2017

Upper-layer film forming composition and method for producing a phase-separated pattern

Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Ryuta Mizuochi, Toyama, JP;

Yasunobu Someya, Toyama, JP;

Hiroyuki Wakayama, Toyama, JP;

Rikimaru Sakamoto, Toyama, JP;

Assignee:

NISSAN CHEMICAL CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Gregory Listvoyb

Int. Cl.
CPC ...
C08F 212/08 (2006.01); B05D 1/38 (2006.01); C08L 53/00 (2006.01); H01L 21/3065 (2006.01); B05D 7/00 (2006.01); C09D 179/08 (2006.01); C09D 125/04 (2006.01); C09D 153/00 (2006.01); C08L 35/06 (2006.01); H01L 21/312 (2006.01); B32B 27/30 (2006.01); C08K 5/06 (2006.01); B05D 7/24 (2006.01); C08F 220/30 (2006.01); H01L 21/027 (2006.01); B05D 3/04 (2006.01); B32B 27/28 (2006.01); C08F 220/06 (2006.01); C08F 220/18 (2006.01); C08F 222/40 (2006.01); C08F 299/02 (2006.01); B05D 3/10 (2006.01); B05D 1/00 (2006.01); B05D 3/02 (2006.01); C08F 220/24 (2006.01);
U.S. Cl.
CPC ...
C08F 212/08 (2013.01); B05D 1/38 (2013.01); B05D 3/0453 (2013.01); B05D 7/24 (2013.01); B05D 7/50 (2013.01); B05D 7/54 (2013.01); B32B 27/281 (2013.01); B32B 27/30 (2013.01); B32B 27/302 (2013.01); B32B 27/308 (2013.01); C08F 220/06 (2013.01); C08F 220/18 (2013.01); C08F 220/30 (2013.01); C08F 222/40 (2013.01); C08F 299/024 (2013.01); C08K 5/06 (2013.01); C08L 35/06 (2013.01); C08L 53/00 (2013.01); C09D 125/04 (2013.01); C09D 153/00 (2013.01); C09D 179/08 (2013.01); H01L 21/027 (2013.01); H01L 21/3065 (2013.01); H01L 21/312 (2013.01); B05D 1/005 (2013.01); B05D 3/0254 (2013.01); B05D 3/105 (2013.01); B05D 2202/00 (2013.01); B05D 2401/31 (2013.01); B05D 2502/005 (2013.01); C08F 220/1806 (2020.02); C08F 220/24 (2013.01); C08F 220/301 (2020.02); C08F 220/302 (2020.02);
Abstract

An overlay film-forming composition used to cause phase separation to a block copolymer-containing layer formed on a substrate, the composition including: (A) a copolymer that includes (a) a unit structure derived from maleimide structure and a unit structure derived from styrene structure; and (B) an ether compound having 8-16 carbon atoms as a solvent. The overlay film-forming composition exhibits good solubility with respect to a hydrophobic solvent, and is able to induce vertical alignment of a block copolymer without causing dissolution, swelling, and the like of the block copolymer-containing layer formed on the substrate.

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