The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Mar. 14, 2018
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventors:

Tetsuya Yoshida, Kakogawa, JP;

Takayuki Fukushima, Takarazuka, JP;

Shinya Kinoshita, Kobe, JP;

Shogo Matsuoka, Kakogawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 19/02 (2006.01); H01L 21/677 (2006.01); B25J 15/10 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
B25J 19/023 (2013.01); B25J 15/106 (2013.01); B25J 19/026 (2013.01); H01L 21/67259 (2013.01); H01L 21/67706 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); H01L 21/68721 (2013.01); H01L 21/68728 (2013.01);
Abstract

A substrate conveying apparatus includes: a substrate grasping hand; a first holding member provided at a tip end portion of the substrate grasping hand and including a plurality of first jaw portions; a second holding member provided at a base end portion of the substrate grasping hand and including a plurality of second jaw portions; a first sensor provided at the base end portion of the substrate grasping hand and configured to emit light or ultrasound and detect substrates; and a controller configured to make the first sensor emit the light or the ultrasound toward spaces each between the adjacent substrates and determine whether or not the substrates are normally held.


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