The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Oct. 04, 2017
Boe Technology Group Co., Ltd., Beijing, CN;
Hefei Xinsheng Optoelectronics Technology Co., Ltd., Anhui, CN;
Zhiguang Guo, Beijing, CN;
Jinxia Hu, Beijing, CN;
Dahu Tang, Beijing, CN;
Xin Cai, Beijing, CN;
Jianfeng Liu, Beijing, CN;
Jing Li, Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD., Anhui, CN;
Abstract
A tank for substrate cleaning, a tank heating apparatus, a tank heating method and a substrate cleaning apparatus are provided. The substrate cleaning tank includes a tank body, a hot waste gas recycle tube, a heater and a heat exchange tube. The hot waste gas recycle tube is used to receive a hot waste gas in a hot waste gas discharge tube of a production line, the heater and the heat exchange tube are used to heat a fluid in the tank body, and the heat exchange tube is communicated with the hot waste gas recycle tube. The hot waste gas is effectively utilized, the power consumption is reduced, the production cost is saved, and the discharge of the hot waste gas is reduced.