The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2020

Filed:

Mar. 15, 2017
Applicant:

Universal Display Corporation, Ewing, NJ (US);

Inventors:

Ruiqing Ma, Morristown, NJ (US);

Jeff Silvernail, Yardley, PA (US);

Prashant Mandlik, Lawrenceville, NJ (US);

Julia J. Brown, Yardley, PA (US);

John Felts, Alameda, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); H01L 51/00 (2006.01); H01L 51/52 (2006.01); C23C 14/24 (2006.01); C23C 14/00 (2006.01); C23C 14/04 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); H01L 51/001 (2013.01); H01L 51/0021 (2013.01); H01L 51/0029 (2013.01); H01L 51/0097 (2013.01); H01L 51/5212 (2013.01); C23C 14/0078 (2013.01); C23C 14/04 (2013.01); C23C 14/243 (2013.01); H01L 2251/5338 (2013.01); H01L 2251/568 (2013.01); Y02E 10/549 (2013.01); Y02P 70/50 (2015.11);
Abstract

A method of forming microelectronic systems on a flexible substrate includes depositing a plurality of layers on one side of the flexible substrate. Each of the plurality of layers is deposited from one of a plurality of sources. A vertical projection of a perimeter of each one of the plurality of sources does not intersect the flexible substrate. The flexible substrate is in motion during the depositing the plurality of layers via a roll to roll feed and retrieval system.


Find Patent Forward Citations

Loading…