The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Sep. 05, 2013
Universal Display Corporation, Ewing, NJ (US);
The Trustees of Princeton University, Princeton, NJ (US);
Prashant Mandlik, Lawrenceville, NJ (US);
Ruiqing Ma, Morristown, NJ (US);
Sigurd Wagner, Princeton, NJ (US);
Bhadrinarayana Lalgudi Visweswaran, Princeton, NJ (US);
The Trustees of Princeton University, Princeton, NJ (US);
Universal Display Corporation, Ewing, NJ (US);
Abstract
Methods for forming a coating over a surface are disclosed. A method includes directing a first source of barrier film material toward a substrate in a first direction at an angle θ relative to the substrate, wherein θ is greater than about 0° and less than about 85°. Additionally, a method of depositing a barrier film over a substrate includes directing a plurality of N sources of barrier film material toward a substrate, each source being directed at an angle θrelative to the substrate, wherein for each θ, θ is greater than about 0° and less than about 180°. For at least a first of the θ, θis greater than about 0° and less than about 85°, and for at least a second of the θ, θis greater than about 95° and less than about 180°.