The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2020

Filed:

Nov. 22, 2019
Applicant:

Newport Fab, Llc, Newport Beach, CA (US);

Inventors:

Jefferson E. Rose, Hawthorne, CA (US);

David J. Howard, Irvine, CA (US);

Gregory P. Slovin, Irvine, CA (US);

Nabil El-Hinnawy, Irvine, CA (US);

Assignee:

Newport Fab, LLC, Newport Beach, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 45/1608 (2013.01); H01L 45/06 (2013.01); H01L 45/1286 (2013.01); H01L 45/143 (2013.01); H01L 45/144 (2013.01); H01L 45/1675 (2013.01);
Abstract

A radio frequency (RF) switch includes a heating element, thermally conductive and electrically insulating layer over the heating element, a wetting dielectric layer over the thermally conductive and electrically insulating layer, and a phase-change material (PCM) over the wetting dielectric layer. At least one cladding dielectric layer can be situated over sides and/or over a top surface of the PCM. Each of the wetting dielectric layer, phase change material, and cladding dielectric layer can comprise at least germanium. A transitional dielectric layer can be situated between the thermally conductive and electrically insulating layer and the wetting dielectric layer. A contact uniformity support layer can be situated over the cladding dielectric layer.


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