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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10862018 B1

PDFFull Text
Date of Patent:
Dec. 08, 2020

Filed:

Jun. 30, 2017

Method for manufacturing a piezoelectric device

Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Takuo Hada, Nagaokakyo, JP;

Kansho Yamamoto, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;

Attorney:

Arent Fox LLP

Primary Examiner:

Paul D Kim

Int. Cl.
CPC ...
H04R 17/00 (2006.01); H01L 41/09 (2006.01); H01L 41/253 (2013.01); B81C 1/00 (2006.01); H01L 41/113 (2006.01); H01L 41/33 (2013.01); H04R 17/10 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); B81C 1/00682 (2013.01); H01L 41/094 (2013.01); H01L 41/0973 (2013.01); H01L 41/113 (2013.01); H01L 41/253 (2013.01); H01L 41/33 (2013.01); H04R 17/10 (2013.01); H04R 31/006 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/032 (2013.01); H04R 17/00 (2013.01); H04R 2201/003 (2013.01);
Abstract

A method for manufacturing a piezoelectric device that includes a substrate and a vibration portion that can include a membrane or a beam that is directly or indirectly supported by the substrate and arranged above the substrate. Moreover, the vibration portion includes a piezoelectric layer and the method includes forming the vibration portion and adjusting a resonance frequency of the vibration portion by locally subjecting a region including the vibration portion to heat treatment.

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Hada, Takuo. (2020). Method for manufacturing a piezoelectric device (U.S. Patent No. 10862018). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10862018

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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