The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2020

Filed:

Jun. 03, 2014
Applicant:

Nissan Motor Co., Ltd., Yokohama, JP;

Inventors:

Wei Ni, Kanagawa, JP;

Tetsuya Hayashi, Kanagawa, JP;

Toshiharu Marui, Kanagawa, JP;

Yuji Saito, Kanagawa, JP;

Kenta Emori, Kanagawa, JP;

Assignee:

Nissan Motor Co., Ltd., Yokohama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 29/10 (2006.01); H01L 21/84 (2006.01); H01L 27/12 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 29/417 (2006.01); H01L 29/78 (2006.01); H01L 21/04 (2006.01); H01L 21/265 (2006.01); H01L 21/306 (2006.01); H01L 29/08 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1095 (2013.01); H01L 21/0475 (2013.01); H01L 21/26586 (2013.01); H01L 21/30604 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 29/41766 (2013.01); H01L 29/4236 (2013.01); H01L 29/66068 (2013.01); H01L 29/66696 (2013.01); H01L 29/66704 (2013.01); H01L 29/7816 (2013.01); H01L 29/7825 (2013.01); H01L 29/7835 (2013.01); H01L 21/047 (2013.01); H01L 29/0865 (2013.01); H01L 29/0882 (2013.01); H01L 29/1608 (2013.01);
Abstract

The semiconductor device includes: a substrate, an n-type drift region formed on a main surface of the substrate; a p-type well region, an n-type drain region and an n-type source region each formed in the drift region to extend from a second main surface of the drift region opposite to the first main surface of the drift region in contact with the substrate in a direction perpendicular to the second main surface; a gate groove extending from the second main surface in the perpendicular direction and penetrating the source region and the well region in a direction parallel to the first main surface of the substrate; and a gate electrode formed on a surface of the gate groove with a gate insulating film interposed therebetween, wherein the drift region has a higher impurity concentration than the substrate, and the well region extends to the inside of the substrate.


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