The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2020

Filed:

Apr. 19, 2018
Applicant:

Vanguard International Semiconductor Corporation, Hsinchu, TW;

Inventor:

Chien-Hsien Song, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/311 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76235 (2013.01); H01L 21/31144 (2013.01); H01L 29/0653 (2013.01); H01L 29/41766 (2013.01); H01L 29/42368 (2013.01); H01L 29/66659 (2013.01);
Abstract

A semiconductor device is provided. The semiconductor device includes a semiconductor layer, and a trench formed in a top surface of the semiconductor layer. The trench has a bottom surface and a sidewall. The semiconductor device further includes source and drain regions. One of the source and drain regions may be disposed at the bottom surface of the trench, and the other may be disposed at the top surface of the semiconductor layer, or vice versa. Alternatively, both source and drain regions may be disposed at the bottom surface of the trench. The semiconductor device may further include a first insulator disposed in the trench and in between the source and drain regions. The semiconductor device may further include a second insulator disposed between first insulator and the source region. The semiconductor device may further include a conductive member that disposed on the first insulator, or on the first and second insulators.


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