The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Jan. 28, 2016
Korea Research Institute of Chemical Technology, Daejeon, KR;
Sang Jin Lee, Daejeon, KR;
Jae Heung Lee, Daejeon, KR;
Woo Jin Choi, Daejeon, KR;
Cheol Hwan Kim, Gyeongsangnam-do, KR;
Sung Hyun Kim, Gyeongsangnam-do, KR;
Seong Geun Cho, Daejeon, KR;
Dong Seok Ham, Daejeon, KR;
Kwang Je Kim, Chungcheongnam-do, KR;
Dong Soon Park, Daejeon, KR;
Jae Seong Park, Daejeon, KR;
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY, Daejeon, KR;
Abstract
The fluoro-based polymer composite target for sputtering according to the present invention is excellent in adhesion with a metal electrode to which a voltage is applied, can prevent bending, and is capable of stably forming plasma by imparting conductivity even with industrially widely used DC and MF power supply systems, thereby allowing a fluorinated polymer to be effectively deposited on an adherend by sputtering.