The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Jul. 16, 2018
Applicant:
Isensecloud, Inc., San Jose, CA (US);
Inventors:
William J. O'Banion, San Jose, CA (US);
An-Dien Nguyen, Fremont, CA (US);
Huy D. Nguyen, San Jose, CA (US);
Assignee:
iSenseCloud, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/02 (2006.01); H01J 37/32 (2006.01); G02B 6/42 (2006.01); G01K 11/32 (2006.01); G01N 29/24 (2006.01); G01N 29/14 (2006.01); G01K 1/14 (2006.01); G01J 3/02 (2006.01); H01L 21/687 (2006.01); H01S 5/06 (2006.01); H01S 5/068 (2006.01); H01S 5/40 (2006.01); G01J 3/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32917 (2013.01); G01J 3/0208 (2013.01); G01K 1/14 (2013.01); G01K 11/3206 (2013.01); G01N 29/14 (2013.01); G01N 29/2418 (2013.01); G01N 29/2462 (2013.01); G02B 6/0208 (2013.01); G02B 6/4204 (2013.01); G01J 3/18 (2013.01); H01J 2237/24585 (2013.01); H01L 21/68742 (2013.01); H01S 5/0617 (2013.01); H01S 5/06804 (2013.01); H01S 5/06808 (2013.01); H01S 5/4087 (2013.01);
Abstract
An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.