The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Sep. 11, 2018
Applicant:
Purdue Research Foundation, West Lafayette, IN (US);
Inventors:
Liang Pan, West Lafayette, IN (US);
Xianfan Xu, West Lafayette, IN (US);
Assignee:
Purdue Research Foundation, West Lafayette, IN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/10 (2006.01); H01J 37/06 (2006.01); H01J 37/12 (2006.01); H01J 37/317 (2006.01); G02B 5/00 (2006.01); H01J 37/073 (2006.01);
U.S. Cl.
CPC ...
H01J 37/10 (2013.01); G02B 5/008 (2013.01); H01J 37/06 (2013.01); H01J 37/073 (2013.01); H01J 37/12 (2013.01); H01J 37/3174 (2013.01); H01J 37/3177 (2013.01); H01J 2201/342 (2013.01); H01J 2237/0492 (2013.01); H01J 2237/062 (2013.01); H01J 2237/06333 (2013.01); H01J 2237/202 (2013.01); H01J 2237/20221 (2013.01);
Abstract
A system for generating an electron beam array, comprising a light source, a first substrate having a plurality of plasmonic lenses mounted thereon, the plasmonic lenses configured to received light from the light source and produce an electron emission, and a plurality of electrostatic microlenses configured to focus the electron emissions into a beam for focusing on a wafer substrate. A light source modulator and digital micro mirror may be included which captures light from the light source and projects light beamlets on the plasmonic lenses.