The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Oct. 15, 2019
Applicant:
Keyence Corporation, Osaka, JP;
Inventors:
Noriyoshi Yamane, Osaka, JP;
Yuichiro Hama, Osaka, JP;
Assignee:
KEYENCE CORPORATION, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); G01B 11/06 (2006.01); G01B 11/25 (2006.01); G02B 26/10 (2006.01); G02B 26/08 (2006.01); G06T 7/70 (2017.01); G03B 21/53 (2006.01); G03B 21/14 (2006.01);
U.S. Cl.
CPC ...
G01B 11/0608 (2013.01); G01B 11/14 (2013.01); G01B 11/2518 (2013.01); G02B 26/0833 (2013.01); G02B 26/105 (2013.01); G06T 7/70 (2017.01); G03B 21/145 (2013.01); G03B 21/53 (2013.01); G06T 2207/20208 (2013.01);
Abstract
To enable scanning using measurement light with a small-sized displacement measuring apparatus. The displacement measuring apparatus includes a MEMS mirror for scanning using measurement light that is output from a light projection lens. The light projection lens has a focus position, at which the measurement light is condensed, at the MEMS mirror or in the vicinity of the MEMS mirror on an optical axis of the measurement light. The measurement light that is reflected at the MEMS mirror spreads in a strip-shaped manner as the measurement light comes close to a measurement region.